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Study of GaP Nucleation Layers Grown on Si by Plasma‐Enhanced Atomic Layer Deposition
Study of GaP Nucleation Layers Grown on Si by Plasma‐Enhanced Atomic Layer Deposition
2019
Alexander S. Gudovskikh
Alexander V. Uvarov
I. A. Morozov
Anton S. Bukatin
Artem I. Baranov
D.A. Kudryashov
Nikolay A. Kalyuzhnyy
Sergey A. Mintairov
Vasily I. Zubkov
George E. Yakovlev
Jean-Paul Kleider
Keywords:
Atomic layer deposition
Physics
Condensed matter physics
Plasma
Nucleation
Correction
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