Combi panel for catoptric projection arrangement

The present invention relates to an optical projection arrangement for imaging a reticle (4) on a substrate (5) having a plurality of reflective elements is defined by a beam path (6), wherein a combined aperture (14) is provided in a pupil plane of the beam path, which having a first opening (16) for use as an aperture diaphragm and at least a second opening (17) for the passage of a beam of the beam path, so that the combination aperture acts as the aperture stop and lens shade, wherein a device for moving the combination aperture is provided such that the Combined aperture transversely, in particular to a meridional plane is movable vertically and wherein said second opening (17) within the meridional plane may be greater than or equal to 10 mm.