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Enhancement of electrical properties of Pt/SrBi2Nb2O9/Pt structures by remote oxygen plasma annealing
Enhancement of electrical properties of Pt/SrBi2Nb2O9/Pt structures by remote oxygen plasma annealing
2004
Ik-Soo Kim
Young Mi Kim
In-Moon Choi
Seong-Il Kim
Young-Hwan Kim
Dong Chul Yoo
Jeong Yong Lee
Chang-Sik Son
Keywords:
Thin film
Nuclear magnetic resonance
Annealing (metallurgy)
Physics
Oxygen
Capacitor
Plasma
Condensed matter physics
oxygen plasma
Correction
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