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NANOPATTERNING OF EPITAXIAL CoSi2 AND ITS USE FOR NANO-MOSFET FABRICATION
NANOPATTERNING OF EPITAXIAL CoSi2 AND ITS USE FOR NANO-MOSFET FABRICATION
1999
S. Mantl
Qing-Tai Zhao
L. Kappius
S. Mesters
B. Kabius
Keywords:
MOSFET
Epitaxy
Nano-
Nanotechnology
Materials science
Fabrication
Correction
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