Semiconductor equipment with capacitor units

Tianhaoer You,fuzii eizi,Gongbo Tian,uemoto yasuhiro,Xuche Na,matuda akihiro,zhangyenengjiu

Semiconductor equipment with capacitor units

1994

Tianhaoer You
fuzii eizi
Gongbo Tian
uemoto yasuhiro
Xuche Na
matuda akihiro
zhangyenengjiu

The present invention provides a semiconductor device forming an integrated circuit formed on a semiconductor substrate capacitance element through an interlayer insulating film. Such a semiconductor apparatus, a film is formed at a moisture content of 0.5 g / cm

Keywords:

Capacitor
Semiconductor device
Semiconductor
Water content
Substrate (electronics)
Capacitance
Integrated circuit
Electronic engineering
Materials science
Optoelectronics
Electrical engineering

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations