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Plasma immersion ion implantation of nitrogen into porous silicon layers
Plasma immersion ion implantation of nitrogen into porous silicon layers
1997
A. Manuaba
I Pintér
E. Szilágyi
G. Battistig
C. Ortega
A. Grosman
G. Amsel
Keywords:
Ion beam analysis
Composite material
Ion implantation
Porous silicon
Nitrogen
Plasma-immersion ion implantation
Materials science
Inorganic chemistry
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