Silicon science and advanced micro-device engineering II/ edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura
2011
This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology; Novel Measurement and System Technology; Information and Communication Engineering; thus offering an up-to-date overview of the subject matter.
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