Coevaporated thin films of Y-Ba-Cu-O utilizing quadrupole mass-spectrometer rate control

Abstract A study of coevaporation of Y, BaF 2 and Cu using a quadrupole mass-spectrometer as an evaporation rate control has been performed. Actual rate values have been determined by RBS analysis and compared with mass-spectrometer settings for different source combinations and partial pressures of oxygen during deposition. It is shown that Y-Ba-Cu films of precise composition can be codeposited by using a mass-spectrometer controlled coevaporation process. The method has been utilized for a deposition on seven different substrates (LiNbO 3 , SrTiO 3 , LaAlO 3 , CaNdAlO 4 , LaGaO 3 , MgO and Al 2 O 3 ) simultaneously. After a post-heat treatment in flowing wet oxygen the films have been analysed regarding resistivity and critical current density.