A simple way to obtain backscattered electron images in a scanning transmission electron microscope.
2014
: We have fabricated a simple detector for backscattered electrons (BSEs) and incorporated the detector into a scanning transmission electron microscope (STEM) sample holder. Our detector was made from a 4-mm(2) Si chip. The fabrication procedure was easy, and similar to a standard transmission electron microscopy (TEM) sample thinning process based on ion milling. A TEM grid containing particle objects was fixed to the detector with a silver paste. Observations were carried out using samples of Au and latex particles at 75 and 200 kV. Such a detector provides an easy way to obtain BSE images in an STEM.
Keywords:
- Analytical chemistry
- Scanning confocal electron microscopy
- Materials science
- Scanning Hall probe microscope
- Conventional transmission electron microscope
- Scanning transmission electron microscopy
- Environmental scanning electron microscope
- Electron tomography
- Electron beam-induced deposition
- Electron microscope
- Annular dark-field imaging
- Optics
- Microscope
- Energy filtered transmission electron microscopy
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