Simple digital phase-measuring algorithm for low-noise heterodyne interferometry

We present a digital algorithm for measuring the phase of a sinusoidal signal that combines the modified digital fringe-counting method with two-sample zero crossing to enable sequential signal processing. This technique can be applied to a phase meter for measuring dynamic phase differences between two sinusoidal signals with high resolution, particularly for heterodyne interferometry. The floor noise obtained from a demonstration with an electrical apparatus is at frequencies above approximately 0.1 Hz for 80 kHz signal frequency. In addition, by applying this method to a commercial heterodyne interferometer with a modulation frequency of 80 MHz, the floor-noise level is confirmed to be from 4 kHz to 1 MHz. We also confirm the validity of the algorithm by comparing its results with those from a standard homodyne interferometer for measuring shock-motion peak acceleration greater than and a 10 mm stroke.