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3D及び2.5D-IC配線に適用可能な低温SiNx膜の特性
3D及び2.5D-IC配線に適用可能な低温SiNx膜の特性
2014
mayumi takeyama
kati satou
yasusi kobayasi
yosihiro nakada
yuuzi nakamura
atusi noya
Keywords:
Analytical chemistry
Materials science
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