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Innovative self-aligned triple patterning for 1x half pitch using single
Innovative self-aligned triple patterning for 1x half pitch using single
2011
Bencherki Mebarki
Hao D. Chen
Yongmei Chen
Aunchan Wang
Jingmei Liang
Kedar Sapre
Tushar Mandrekar
Xiaolin Chen
Ping Xu
Pokhui Blanko
Christopher S. Ngai
Christopher Dennis Bencher
Mehul S. Naik
Keywords:
Electronic engineering
Materials science
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