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Total Reflection Amorphous Carbon Mirrors in EUV and Soft X-ray Range
Total Reflection Amorphous Carbon Mirrors in EUV and Soft X-ray Range
2016
谭默言 Tan Moyan
蒋励 Jiang Li
王占山 Wang Zhanshan
Keywords:
Optics
Physics
Amorphous carbon
X-ray
Optoelectronics
Extreme ultraviolet lithography
Total internal reflection
soft x ray
Correction
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