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EUV Light Sources by Laser-Produced Plasmas Using Cryogenic Xe and Li Targets
EUV Light Sources by Laser-Produced Plasmas Using Cryogenic Xe and Li Targets
2008
Sho Amano
Akihisa Nagano
Takahiro Inoue
Shuji Miyamoto
Takayasu Mochizuki
Keywords:
Laser
Plasma
Optics
Atomic physics
Physics
Extreme ultraviolet lithography
Optoelectronics
Correction
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