Method for Analysis XPS Data of Nanolayered Samples

A method has been developed for fitting the XPS spectra with a background of inelastic loss, which was realized analytically for Fourier calculated images. The use of the Tougaard method allowed us to obtain the contribution of the background of inelastic losses, which depends on the morphology of the sample. Instead of the universal inelastic cross section, an analytical expression was used for the cross section of the Shirley method to define the peaks in the form of Doniah-Sunjic. Due to computations for Fourier images, it became possible to carry out simultaneous fitting of several spectra obtained for different chemical elements of one sample and to consider the hardware effects when synthesizing the spectra. As a result of the analysis of the spectra, the structure and composition of the nano-layered chromium-carbide protective coating deposited by method of metal–organic chemical vapor deposition (MOCVD) were established.