Multicomponent Sn–Mo–O-containing films formed in anodic alumina matrixes by ionic layer deposition

Abstract Multicomponent metal oxide compounds of the composition Sn–Mo–O, Sn–Ni–Mo–O and Sn–Bi–Mo–O were formed by successive ionic layer adsorption and reaction (SILAR) method deposition into anodic alumina matrixes. The growth mechanism of the Sn–Mo–O-containing films in the porous anodic alumina was investigated. It was found that the degree of pore filling, specific thickness and surface morphology of the deposited layer depend not only on the number of cycle’s treatment, but also on the composition of the used solutions. The morphology of Sn–Mo–O and Sn–Ni–Mo–O surfaces had granular structures, while Sn–Bi–Mo–O layer had flake-like structure. The differences in microstructure and deposition of the layers on the surface of the matrixes can be explained by the insufficient activation of anodic alumina pores before deposition. The investigations of the formed layers composition by the electron-probe X-ray spectral microanalysis showed that the ratio of tin to molybdenum in tin-molybdenum containing oxides changes. The Sn/Mo atomic ratio for Sn–Mo–O layer is 1.29/2.72; for Sn–Ni–Mo–O layer is 5.83/4.85; for Sn–Bi–Mo–O layer is 0.60/0.87. The using of SILAR method allows forming multicomponent films in the anodic alumina matrixes, which have great potential to applicate in high-sensitivity gas sensors.