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Cyclic PEALD of Ge 2 Sb 2 Te 5 Films Using Metallorganic Sources
Cyclic PEALD of Ge 2 Sb 2 Te 5 Films Using Metallorganic Sources
2007
Byung Joon Choi
Seol Choi
Yong Cheol Shin
Cheol Seong
Jin-Wook Lee
Jaehack Jeong
Yoon Jung Kim
Sung-Yeon Hwang
Suk-Kyoung Hong
Keywords:
Analytical chemistry
Materials science
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