Old Web
English
Sign In
Acemap
>
Paper
>
Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition
2011
Woo Hee Kim
Min Kyu Kim
W. J. Maeng
Julien Gatineau
Venkat Pallem
Christian Dussarrat
Atif Noori
D.J. Thompson
Schubert S. Chu
Hyung Jun Kim
Keywords:
Plasma
Atomic layer deposition
Cerium
Chemistry
Inorganic chemistry
Correction
Source
Cite
Save
Machine Reading By IdeaReader
28
References
26
Citations
NaN
KQI
[]