Soft‐lithographically fabricated nanofluidic channels for single‐DNA measurements

We report on the fabrication of submicrometer wide channels by applying advanced soft lithography and focused ion beam patterning. Using so-called hard PDMS, mechanically stable channels are obtained down to 375 nm width. Channels down to ∼100 nm width are made from Ormostamp. The channels can be filled with DNA solution. Manipulation of the DNA transport through the channels is accomplished by applying electrophoretic forces.