High Available Carbon Nanotube Film Micro-Device with Controllable Temperature Coefficient of Resistance

This paper presents a multi-role single-walled carbon nanotube (SWCNT) film micro-device with the controllable temperature coefficient of resistance (TCR). The SWCNT film is prepared on flexible or silicon substrates by dielectrophoresis (DEP) technique. Modified vacuum thermal annealing is carried out to adjust the chip with the positive, negative and near-zero TCR ranging from −15768ppm/K to 9934ppm/K for different applications. Demonstrations in a thermostatic water bath and micro-wind tunnel confirm that the proposed device has a broad application field, such as a temperature sensor, flow sensor and heater etc.