Flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and manufacturing method thereof

The invention provides a flexible organic film capacitive sensor capable of sensing humidity and gas simultaneously and a manufacturing method thereof. The structure of the flexible organic film capacitive sensor is shown in the figure 1. The sensor comprises a substrate (1), a lower electrode (2), a humidity sensitive layer (3), a gas sensitive layer (4), two dielectric layers (501 and 502) and two upper electrodes (601 and 602). In the sensor, the substrate is made of PET, the lower electrode is made of ITO, the humidity sensitive layer is made of polyimide or polymethyl methacrylate, the gas sensitive layer is made of propyl group-trimethoxy silane or 3-diethyl aminopropyl-trimethoxy silane, the dielectric layers are made of insulated organic materials and located on the two sides of the gas sensitive layer with the middle exposed outside, and the two upper electrodes are made of metal gold and located on the two dielectric layers respectively.