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Nano-meter Accuracy Positioning and its Control Method of Micro Motion Stage Driven by Pneumatic Bellows
Nano-meter Accuracy Positioning and its Control Method of Micro Motion Stage Driven by Pneumatic Bellows
2017
Toshinori Fujita
Kazutoshi Sakaki
Satomi Miyazaki
Keiichi Miyazaki
Keywords:
Nanometre
Control engineering
Materials science
Bellows
micro motion
control methods
Mechanical engineering
Correction
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