Phase measurement at fixed frequency for chemical detection using resonant microcantilevers

A simple alternative way to measure the resonant frequency shift of microcantilever-based chemical sensor is proposed. The main idea is to actuate the microcantilever at a fixed frequency, close to the resonant frequency , and to read out the cantilever signal phase. The signal to noise ratio of the proposed measurement method is compared to the oscillator configuration method in the case of toluene detection by polymeric sensitive coating.