Cu passivation for integration of gap-filling ultralow-k dielectrics

For Cu/low-k interconnects, the reversed damascene is an alternative integration approach where the metal wires are patterned first and then the spacing filled with a flowable dielectric. In this paper, the replacement of a sacrificial template by gap-filling ultralow-k dielectrics is studied, focusing on yield and transport performance (“replacement dielectric” scheme). On non-passivated copper, the low-k curing processes induce severe damage to the metal lines, leading to the degraded electrical properties. This is confirmed by chemical inspection on the blanket Cu films and morphological inspection on patterned structures. In order to avoid Cu oxidation and out-diffusion at elevated temperature, Cu passivation by plasma-enhanced chemical vapor deposition SiCN is proposed and studied in detail. The inter-metal dielectric properties of replacement low-k are evaluated by resistance-capacitance and IV measurements using a Meander-Fork structure. By tuning the passivation layer thickness and ultraviolet cur...