Impact of Technological Operations Parameters on Moems Components Formation

Oleksandr Filipenko,Olena Chala,Viktoriia Bortnikova,Oksana Sychova,Iryna Botsman

Impact of Technological Operations Parameters on Moems Components Formation

2019

Oleksandr Filipenko
Olena Chala
Viktoriia Bortnikova
Oksana Sychova
Iryna Botsman

In the paper the modeling results for the process of MOEMS functional surfaces shaping are presented. The significance and magnitude of factors that directly affect the shaping process of MOEMS functional surfaces were determined.

Keywords:

Computer science
Process engineering
Polishing
Mechanical engineering
Grinding
Materials science
micro mirror

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