ТЕОРЕТИЧНІ АСПЕКТИ МОДЕЛЮВАННЯ ТА ПРОЕКТУВАННЯ РЕЗОНАТОРНИХ ЗОНДІВ ДЛЯ СКАНУЮЧОЇ МІКРОХВИЛЬОВОЇ МІКРОСКОПІЇ

In the work the general approaches to an estimation of influence of characteristics resonator probes on spatial resolution and contrast of images in scanning microwave microscopy are proved. In particular, the dependences of scanning signals which are caused by influence of object of research on a value of quality factor and resonance frequency of probes from geometry of the coaxial aperture, the form of an edge and gap size between a probe and object are qualitatively and quantitatively established. For a physical substantiation of these dependences on the specified characteristics there were three dimensional distributions of a near field numerically investigated. Transition from «tubular» character of distribution of a field, which is characteristic for the flat form of an edge, to quasigaussian distribution of a field for the spherical form of an edge is especially pointed. The established dependences can be used for optimum designing of resonator probes of microwave microscopes for different function.