Combined scanning microwave and electron microscopy: A novel toolbox for hybrid nanoscale material analysis

A novel toolbox for hybrid nanoscale material characterization is presented. The system consists of a nanorobotic, compact and modular near-field scanning microwave microscope (NSMM) integrated into a high resolution scanning electron microscope (SEM). The instrument developed can perform hybrid characterizations by providing simultaneously atomic force, complex microwave impedance and electron microscopy images of material samples with nanometer spatial resolution. By combining the measured data, the system offers unprecedentable capabilities for tackling the issue between spatial resolution and high frequency quantitative measurements.