Electrical probe diagnostics for processing discharges

This paper is intended to provide an overview of Langmuir probe diagnostics for process plasmas. The discussion will focus on plane and cylindrical single current collecting probes. Methods will be presented for the determination of the plasma potential floating potential electron and ion densities electron temperature and electron energy distribution function. Common problems and pitfalls will also be discussed.© (1991) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.