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A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
2017
Christian Walk
Holger Vogt
Wilfried Mokwa
Michael Görtz
Keywords:
Microelectromechanical systems
Pressure sensor
Membrane
CMOS
Electronic engineering
Materials science
cmos mems
Optoelectronics
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