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Work-function engineering of poly-Si gate by Fermi level pinning and its impact on low power CMOSFET
Work-function engineering of poly-Si gate by Fermi level pinning and its impact on low power CMOSFET
2006
Shimamoto Yasuhiro
Yugami Jiro
Inoue Masao
Mizutani Masaharu
Hayashi Takashi
Yoneda Masahiro
Keywords:
Work function
Condensed matter physics
Fermi level
Physics
fermi level pinning
work function engineering
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