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Measuring subsurface damage in diamond wire sawn mono-crystalline Silicon (120 µm) wafers using Raman spectroscopy
Measuring subsurface damage in diamond wire sawn mono-crystalline Silicon (120 µm) wafers using Raman spectroscopy
2017
Halubai Sekhar
Tetsuo Fukuda
Katsuto Tanahashi
Katsuhiko Shirasawa
Hidetaka Takato
Keywords:
Diamond
Raman spectroscopy
Crystallography
Wafer
Crystalline silicon
Materials science
Optoelectronics
micro raman spectroscopy
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