Improved I/sub DDQ/ testing with empirical linear prediction

A new linear prediction method that improves I/sub DDQ/ test effectiveness is described. The method uses statistical pre-processing of exhaustive measurements on training devices to extract principal patterns in the device I/sub DDQ/ behavior and to generate a prediction model. Fitting the model to device measurements accommodates variations in the fabrication process. Comparison with the Delta I/sub DDQ/ test method using the SEMATECH S-121 data shows that for nearly equal numbers of defective parts passed, the new method fails fewer defect-free parts.