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Polishing liquid and a polishing method of a silicon carbide
Polishing liquid and a polishing method of a silicon carbide
2009
tosirou toi
osamu oonisi
yasusi ei yamaguti
yasuhiro kawase
sei hasegawa
syuuhei kurokawa
Keywords:
Silicon carbide
Polishing
Chemical-mechanical planarization
Composite material
Materials science
Metallurgy
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