Solid imaging device, method for manufacturing the same, and camera using the same
2005
In order to realize a small influence by the manufacturing variation, and highly sensitive solid state imaging device with high efficiency condensing elements condensing unit pixel of the solid-state imaging device of the present invention include: a photodiode (8) which incident light (13) photoelectric conversion; convex transmissive layer (15), which is formed over a photodiode (8), and a light transmissive; and an irregular shape of the lens layer (11), which is formed in the upper transmissive layer (15) and outside, the incident light (13) for collecting and transmitting to the emission layer (15). Refractive index of the transmissive layer (15) is larger than the refractive index of the lens layer (11). Thickness of the transmission layer (15) and the width is set to a wavelength of light becomes a predetermined focal distance with respect to a predetermined. Lens layer (11) of BPSG film, a film of TEOS, benzocyclobutene and polyimide-based resin according to any of one configuration.
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