Fine charge sensing using a silicon nanowire for biodetection

This paper proposes an extensive analysis of the impact of both structural effect and charge parameters on silicon nanowire-based biological sensors, for single-charge detection. These parameters are calibrated on physical and electrical characterizations and are subsequently introduced in a compact model to predict the signal over noise ratio (SNR). We finally propose rules for the design of nanowires and recommendations for the placement of the biological element, inducing the single charge release.