Defects Detection on Silicon Nitride Balls by Laser Ultrasonics

In this work, we study the generation and the detection of surface waves on silicon nitride balls a few millimetres in diameter. The excitation of these waves is carried out thanks to a pulsed laser YAG and their detection is achieved with a laser interferometric probe. The whole of the device requires neither coupling nor direct contact with the balls. These waves are then used for the analysis of defects close to the surface of the balls. Several measurements are carried out on samples presenting various defects. Correlation attempts are also carried out between some ultrasonic parameters and some characteristics of defects.