A METHOD OF MICRO-SPHERE COMPLETE POSITION BASE ON PERPENDICULAR AXIS AND POSITIONING ACCURACY ANALYSIS

The vacuum adsorption is one of the most effective ways to handle micro sphere. To position a certainly place on micro sphere’s surface, the positioning principle realized by double shafting was firstly analyzed. A system combined with the atomic force microscope (AFM), the precision rotating air-bearing, assistant transform shaft, translation stage and vacuum adsorption devices was developed. Then the micro tube to adsorb the micro sphere was fabricated, and the positioning error was also analyzed with a positioning accuracy of approximately less than 5 degrees. Finally, the surface positioning experiment was carried out which indicated its feasibility. This method and device can also realize some surface traces on micro sphere during circumferential measurement and micro-machining.