Independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform
2013
The utility model relates to an independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform and belongs to the field of precise scientific microscopic observation instruments. The platform is composed of X-axis, Y-axis and Z-axis precise movable assemblies, X-axis and Z-axis rotary assemblies, X-axis, Y-axis and Z-axis flexible hinge type ultra-precise following assemblies and a super-view deep observation lens. The X-axis, Y-axis and Z-axis precise movable assemblies and the X-axis and Z-axis rotary assemblies can be used for respectively carrying out the precise adjustment on relative positions and relative angles of the super-view deep observation lens in X, Y and Z directions of an observation test piece. The X-axis, Y-axis and Z-axis flexible hinge type ultra-precise following assemblies can realize active following of the test piece in microseismic movement relative to a load in the X, Y and Z directions. The Y-axis precise movable assembly can assist the super-view deep lens in zooming. The super-view deep lens is used for carrying out super-view deep observation on the shape of a microcosmic surface of the test piece. The independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform has the advantages of ingenious volume, precise driving, good following effects, high integration and strong practicability. The independent five-degree-of-freedom ultra-precise material in-situ test microscopic observation platform can be used independently, and can also be combined with other equipment to use.
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