CO 2 measurement using an AlN/SI SAW sensor

Carbon dioxide at concentrations close to 390ppm in atmosphere has to be measured for greenhouse effect and the indoor air quality monitoring. This paper reports for the first time CO 2 measurement ranging from 0 to 3000ppm using a Surface Acoustic Wave sensor (SAW) based on Aluminum Nitride (AlN) technology. The detection is based on gravimetric approach using a 100 nm thick sensitive polymer bearing amino groups: poly(Allylamine) deposited over the SAW. A calculated CO 2 sensitivity of about 15.3 Hz/ppm performed using Finite Element Method is in good agreement with experiment.