Silicon field-emitter arrays for cathodoluminescent flat-panel displays

— Cathodoluminescent flat-panel displays can be made with field-emitter arrays (FEAs). Using orientation-dependent etching and a linear thermal-oxidation process, uniform and reproducible FEAs which yield more than 10 μA per tip with less than 140-Vdc extraction voltages have been fabricated. Modulation voltages are in the 40-V region. These FEAs can be the basis for a simple and inexpensive cathodoluminescent flat-panel display.