Morphology of Diamond Films Produced by ECR-PACVD

Diamond films were produced at a relatively low pressures (<1 Torr) by the ECRs-PACVD method of gas mixtures containing CO (5%), H2 (95%) and traces of oxygen at substrate temperatures from ambient (no intentional heating) to 1050°C. Faceted surface morphologies were observed even at the lowest temperature of growth. The microstructure is dominated by octahedral crystals below 600°C, by cubic crystals at 800-900°C, and by multiply twined (111) crystals at temperatures higher than 950°C. The weak temperature dependence of the growth rate is consistent with hydrogen abstraction from the growing surface being the rate controlling step.