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Chemical etching of Bi12GeO20 and Bi12SiO20 single crystals
Chemical etching of Bi12GeO20 and Bi12SiO20 single crystals
1996
L. s. Tarasova
V. M. Skorikov
Keywords:
Dry etching
Inorganic chemistry
Isotropic etching
Dissolution
Etching (microfabrication)
Reactive-ion etching
Crystal
Chemistry
Correction
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