Microacoustic device with improved temperature compensation
2014
With acoustic waves working component, with a layer (SU) of a piezoelectric material with at least one pair of electrodes (EL, EL1, EL2) for excitation of acoustic waves in the piezoelectric material having a compensation layer (KS), which is arranged in the component, that at least a part of the energy of the acoustic wave is in the compensation layer . wherein the compensation layer comprises an inorganic dielectric material having a negative thermal expansion coefficient, wherein the material is selected from a transition metal compound, a rare earth element, an oxide or non-oxide network former and one of the fluorine-based compounds ScF
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KQI