Microacoustic device with improved temperature compensation

2014 
With acoustic waves working component, with a layer (SU) of a piezoelectric material with at least one pair of electrodes (EL, EL1, EL2) for excitation of acoustic waves in the piezoelectric material having a compensation layer (KS), which is arranged in the component, that at least a part of the energy of the acoustic wave is in the compensation layer . wherein the compensation layer comprises an inorganic dielectric material having a negative thermal expansion coefficient, wherein the material is selected from a transition metal compound, a rare earth element, an oxide or non-oxide network former and one of the fluorine-based compounds ScF
    • Correction
    • Source
    • Cite
    • Save
    • Machine Reading By IdeaReader
    0
    References
    0
    Citations
    NaN
    KQI
    []