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Atomic Scale Analysis of Dopants in CMOS Structures by Atom Probe Tomography
Atomic Scale Analysis of Dopants in CMOS Structures by Atom Probe Tomography
2016
Isabelle Martin
Robert Estivill
M. Juhel
Adeline Grenier
Ty J. Prosa
David J. Larson
Keywords:
Atom probe
Analytical chemistry
Materials science
Atomic units
CMOS
Dopant
Nanotechnology
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