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The influence of Au‐nanoparticles presence in PDMS on microstructures creation by ion beam lithography
The influence of Au‐nanoparticles presence in PDMS on microstructures creation by ion beam lithography
2020
Oleksandr Romanenko
Petr Slepička
P. Malinský
Mariapompea Cutroneo
Vladimír Havránek
James Stammers
Václav Švorčík
Anna Macková
Keywords:
Inorganic chemistry
Chemistry
Colloidal gold
Shrinkage
Microstructure
Ion beam lithography
Nanotechnology
Nanoparticle
Correction
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