Precise computer control of the MBE process — application to graded InGaAlAs/InP alloys

Abstract We report MBE growth techniques for the precise control of composition in both graded and uniform composition InGaAlAs alloys. Flux modulation through precise control of the effusion cell setpoint temperatures, including corrections for thermal transient effects, is used to achieve graded alloy compositions as well as to maintain a uniform composition in the presence of disturbances such as shutter operations.