Synthesis of Ti 2 N-TiSi 2 Layers by One-Step Excimer Laser Irradiation

In the present work a novel approach to suicide and nitride formation on the surface of silicon single crystals wafers is reported. The compound growth occurs directly in the place of interest as a result of a laser promoted chemical reaction. Results indicate that it is possible to obtain a titanium nitride layer superimposed on a titanium suicide film with a single-step laser irradiation process. The thickness of the suicide and nitride layers can be adjusted by a proper choice of the laser fluence and number of subsequent pulses.