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The Fabrication of Floating Gate CMUT with Multi Cantilevers and Its Failure Analysis
The Fabrication of Floating Gate CMUT with Multi Cantilevers and Its Failure Analysis
2021
Jiajun Liu
Benxian Peng
Fengqi Yu
Keywords:
Manipulator
Optoelectronics
Materials science
Fabrication
cmos mems
Cantilever
Capacitive micromachined ultrasonic transducers
Correction
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