Si (211) substrate thinning technology for HgCdTe focal plane arrays on Si substrates
2010
A wet chemical etching method for (211)Si substrates was demonstrated in this paper. The morphologies and cleanness
of (211) Si surface etched in different mixture ratio HF-HNO 3 -HAC solutions have been studied by using optical
microscope and the surface profile measuring system (SPMS). The analysis of the surface images indicated that the Si
etched by the HF-HNO 3 -HAC (2:15:5) has the smoother surface, and the wet chemical etching can effectively eliminate
the damage introduced by the chemo-mechanical polishing. An auto wet chemical etching agitator which can move in
the vertical orientation was used. The wet chemical etching rate of (211) Si was obtained in the room temperature and the
transmitted spectra of (211) Si with different thickness were measured by Fourier Transform Infrared Spectroscopy
(FTIR) and compared. It is confirmed that the Si with different thickness make no difference to the spectral response in
mid-wave. By using this novel technology, the Si substrate of HgCdTe/Si detector was removed completely with the HF-HNO 3 -
HAC (2:15:5) solution. It is obvious that the wet chemical etching method can remove the (211) Si substrates with
no damage and detector can work better.
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