Formation of polycrystalline and microcrystalline composite thin films by codeposition and surface chemical reaction

Abstract The formation mechanisms of nanocrystalline composite structures are discussed, and results on co-deposited material system of C 60 –Au, C 60 –Cu as well as Al–SiO x are presented. Three type of structures are distinguished in the composite films, depending on the concentration of the additive. The decisive structure-forming phenomena are the kinetic segregation of the minority species and the chemical reaction of the deposited components.